Large Aperture Surface Profilemeter

Large Aperture Surface Profilemeter

Product Name

Large Aperture Surface Profilemeter

Interferometer System

Fizeau type phase shift laser interferometer

Light Source

632.8nm laser

Clear Aperture

φ300 ~ φ600mm each kind

Purpose of Use

Measurement for large aperture surface form

Specifications, Features, and Benefits

  • Strong with oscillation

  • ×1 ~ ×6 with zoom

  • Utilized instant phase shift Fizeau type interferometer

  • Analysis with more than 0.1μm precision for surface form

  • Possible to produce φ300~φ600mm interferometer

※Please contact us for your larger aperture request.